1～15 item / All 15 items
It is ideal for high-speed lens positioning in laser interferometers and positioning of large-diameter mirrors.
The built-in displacement sensor type enables high-precision positioning when combined with a closed piezo controller. For more details, please download the catalog or contact us.
Type with a stroke of 50 to 1800 µm, high-resolution operation with capacitive sensors.
The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*
Compact nanopositioner. It is a piezo-based nanopositioning system featuring a closed-loop stroke of 100 μm.
The P-611.Z stage is a piezo-based nanopositioning system featuring a footprint of just 44 x 44 mm and a closed-loop stroke of 100 μm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.
Achieving fine positioning with a maximum stroke of 1800µm and nanometer precision.
The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.
Compact XYZ piezo stage with 40mm size and 100µm operation on the XYZ axis.
The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.
Ideal for high-speed lens positioning in laser interferometers and large-diameter mirror positioning!
The built-in displacement sensor type enables high-precision positioning when combined with a closed piezo controller. For more details, please download the catalog or contact us.
![[For semiconductors] 0.1nm resolution compact X-axis piezo stage](https://image.mono.ipros.com/public/product/image/311014/IPROS10166863904929208198.jpg?w=280&h=280)
Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.
In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.
Stabilizing nano-level measurements with 0.1nm resolution and high linearity.
In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development
![[For Biotechnology] PIHera Compact X-axis Piezo Stage](https://image.mono.ipros.com/public/product/image/311014/IPROS11569431223664387747.jpg?w=280&h=280)
Easy nano positioning with 0.1nm resolution and high stability control.
In the field of biotechnology, particularly in cell manipulation, precise positioning is required while minimizing damage to the cells. Nano-level accuracy is essential for elucidating biological phenomena, such as in cell culture, microscopic observation, and microinjection. Inaccurate positioning can lead to experimental failures and decreased reliability of data. PI's 0.1nm resolution nanopositioner enables precise positioning in cell manipulation, contributing to increased efficiency and accuracy in research. 【Application Scenarios】 - Cell culture - Microscopic observation - Microinjection - Cell selection 【Effects of Implementation】 - Minimizing damage to cells and improving the success rate of experiments - Enhancing the reliability of experimental data through accurate positioning - Achieving greater efficiency in research and more detailed observations
100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.
In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design
A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.
In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality
![[Piezostage for Microscopes] XYZ Axis P-616](https://image.mono.ipros.com/public/product/image/311014/IPROS13760463920682739231.png?w=280&h=280)
A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.
In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design
![[Piezostage for Semiconductor Manufacturing] XYZ Axis P-616](https://image.mono.ipros.com/public/product/image/311014/IPROS8561207179750326011.png?w=280&h=280)
For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.
In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes
![[Piezostage P-616 for Nanotechnology] XYZ Axis](https://image.mono.ipros.com/public/product/image/311014/IPROS4043603657529376386.png?w=280&h=280)
Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.
In the field of nanotechnology, the precision of sample and probe positioning significantly affects the reproducibility of experimental results. Scanning Probe Microscopy (SPM) and nano-lithography applications require stable XYZ control with nanometer resolution. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for high-precision positioning at nanometer resolution. It is utilized as a positioning control platform that supports nanoscale measurement, processing, and evaluation, catering to both research applications and device integration. 【Application Scenarios】 - Scanning Probe Microscopy (SPM/AFM/STM) - Nano-lithography equipment - Nano material evaluation - Nano device research and development - High-precision sample positioning 【Benefits of Implementation】 - High-precision position control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning enabled by high-rigidity design - Compact design facilitates integration into vacuum systems and research equipment
For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.
In the field of microscopy, precise scanning of samples is required. Especially in high-magnification observations and analysis of fine structures, accurate positioning is essential. Misalignment can lead to degradation of the observed image and a decrease in measurement accuracy. The PIHera P-620.1/629.1 series addresses these challenges with 0.1 nm resolution and high-precision positioning. 【Application Scenes】 - Scanning of microscope samples - Optical alignment - Interferometric measurements 【Benefits of Implementation】 - High-precision observation and measurement - Accurate analysis of fine structures - Improved experimental efficiency You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.
